This is the first book to bring together both the basic theory and proven process engineering practice of AFM. It is presented in a way that is accessible and v

Since 1995, the noncontact atomic force microscope (NC-AFM) has achieved remarkable progress. Based on nanomechanical methods, the NC-AFM detects the weak attra

Atomic force microscopes are very important tools for the advancement of science and technology. This book provides an introduction to the microscopes so that s

Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at buildi

The tremendous impact of electronic devices on our lives is the result of continuous improvements of the billions of nanoelectronic components inside integrated