This volume deals with the basic knowledge and understanding of fundamental interactions of low energy electrons with molecules. It pro vides an up-to-date and

Presents electron-collision cross section data and transport coefficients for gases used in the manufacturing of semiconductor devices from the Electronics and

Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the worldâ€"electronics, aerospace, automotive,

The authors recently completed an updated review, synthesis, assessment, and discussion of low-energy electron interactions with the plasma processing gases CF4

Pattern transfer by dry etching and plasma-enhanced chemical vapor de position are two of the cornerstone techniques for modern integrated cir cuit fabrication.