Handbook of Silicon Semiconductor Metrology
Author | : Alain C. Diebold |
Publisher | : CRC Press |
Total Pages | : 703 |
Release | : 2001-06-29 |
ISBN-10 | : 9780203904541 |
ISBN-13 | : 0203904540 |
Rating | : 4/5 (41 Downloads) |
Book Synopsis Handbook of Silicon Semiconductor Metrology by : Alain C. Diebold
Download or read book Handbook of Silicon Semiconductor Metrology written by Alain C. Diebold and published by CRC Press. This book was released on 2001-06-29 with total page 703 pages. Available in PDF, EPUB and Kindle. Book excerpt: Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay