Handbook of Silicon Semiconductor Metrology

Handbook of Silicon Semiconductor Metrology
Author :
Publisher : CRC Press
Total Pages : 703
Release :
ISBN-10 : 9780203904541
ISBN-13 : 0203904540
Rating : 4/5 (41 Downloads)

Book Synopsis Handbook of Silicon Semiconductor Metrology by : Alain C. Diebold

Download or read book Handbook of Silicon Semiconductor Metrology written by Alain C. Diebold and published by CRC Press. This book was released on 2001-06-29 with total page 703 pages. Available in PDF, EPUB and Kindle. Book excerpt: Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay


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