GaAs processing has reached a mature stage. New semiconductor compounds are emerging that will dominate future materials and device research, although the proce

This book covers theoretical and practical aspects of all major steps in the fabrication sequence. This book can be used conveniently in a semester length cours

Fabless (no fabrication) IC (integrated circuit) techniques are growing rapidly and promise to become the standard method of IC manufacturing in the near future

This book focuses on foundry-based process technology that enables the fabrication of 3-D ICs. The core of the book discusses the technology platform for pre-pa