Integration of Ferroelectric and Piezoelectric Thin Films

Download or read book Integration of Ferroelectric and Piezoelectric Thin Films written by Emmanuel Defaÿ and published by John Wiley & Sons. This book was released on 2013-03-04 with total page 329 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book contains four parts. The first one is dedicated to concepts. It starts with the definitions and examples of what is piezo-pyro and ferroelectricity by considering the symmetry of the material. Thereafter, these properties are described within the framework of Thermodynamics. The second part described the way to integrate these materials in Microsystems. The third part is dedicated to characterization: composition, structure and a special focused on electrical behaviors. The last part gives a survey of state of the art applications using integrated piezo or/and ferroelectric films.