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This book covers the state of the art of laser micro- and nanotechnology. The physical fundamentals of different processes and the application are presented. Th
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Laser-Assisted Microtechnology
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Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems in microelectronic design and fabrication. It covers micromachining o
Handbook of Laser Micro- and Nano-Engineering
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This handbook provides a comprehensive review of the entire field of laser micro and nano processing, including not only a detailed introduction to individual l
Laser-assisted Micro- and Nanotechnologies 2003
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Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics