Micro and Nano Fabrication

Author	: Hans H. Gatzen
Publisher	: Springer
Total Pages	: 537
Release	: 2015-01-02
ISBN-10	: 9783662443958
ISBN-13	: 3662443953
Rating	: 4/5 (58 Downloads)

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Book Synopsis Micro and Nano Fabrication by : Hans H. Gatzen

Download or read book Micro and Nano Fabrication written by Hans H. Gatzen and published by Springer. This book was released on 2015-01-02 with total page 537 pages. Available in PDF, EPUB and Kindle. Book excerpt: For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

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