An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of mic

In this volume, Micromachining - New Trends and Applications, researchers from distant parts of the world have combined efforts and contributed their ideas and

Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affectin

Due to their flexible and efficient capabilities, lasers are often used over more traditional machining technologies, such as mechanical drilling and chemical e

Explaining principles underlying the main micromachining practices currently being used and developed in industrial countries around the world, Micromachining o