Research on electronic transport in ultra small dimensions has been highly stimulated by the sensational developments in silicon technology and very large scale

The papers contained in the volume represent lectures delivered as a 1983 NATO ASI, held at Urbino, Italy. The lecture series was designed to identify the key s

This book is devoted to the physics of electron-beam, ion-beam, optical, and x-ray lithography. The need for this book results from the following considerations

A Workshop on the Physics and Modeling of Submicron Structures has been held. The results and lectures of the Workshop are briefly described.