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This third edition has been extended considerably to incorporate more information on instrument influences on the interpretation of X-ray scattering profiles an
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During the last 20 years interest in high-resolution x-ray diffractometry and reflectivity has grown as a result of the development of the semiconductor industr
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Since its development toward the end of the past millennium, high-resolution Inelastic X-Ray Scattering (IXS) has substantially improved our knowledge of the co
X-Ray Metrology in Semiconductor Manufacturing
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The scales involved in modern semiconductor manufacturing and microelectronics continue to plunge downward. Effective and accurate characterization of materials
X-ray Scattering From Semiconductors (2nd Edition)
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This book presents a practical guide to the analysis of materials and includes a thorough description of the underlying theories and instrumental aberrations ca