Fundamental Principles of Engineering Nanometrology
Author | : Richard Leach |
Publisher | : William Andrew |
Total Pages | : 349 |
Release | : 2009-09-03 |
ISBN-10 | : 9781437778328 |
ISBN-13 | : 1437778321 |
Rating | : 4/5 (28 Downloads) |
Download or read book Fundamental Principles of Engineering Nanometrology written by Richard Leach and published by William Andrew. This book was released on 2009-09-03 with total page 349 pages. Available in PDF, EPUB and Kindle. Book excerpt: Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study. - Provides a basic introduction to measurement and instruments - Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force - Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal, variable focus, and scattering instruments) - Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties) - Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge