Pattern transfer by dry etching and plasma-enhanced chemical vapor de position are two of the cornerstone techniques for modern integrated cir cuit fabrication.

This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.

MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific proc

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With the encroachment of the Internet into nearly all aspects of work and life, it seems as though information is everywhere. However, there is information and