Impact of Mechanical Stress on Nanostructures for NEMS Application

Download or read book Impact of Mechanical Stress on Nanostructures for NEMS Application written by Xin Xu and published by . This book was released on 2010 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Mechanical stress can be used to improve the device properties. Five commonly used mechanical stress study methods are enumerated in this thesis. However, only ultra-thin membrane and AFM method are suitable for applying the force to the nanostructures to realize the static and dynamic deformation. The mathematic model of AFM and ultra-thin membrane method can be obtained according to Euler-Bernoulli beam and thin-plate theory. Relaying on the FEM simulations, we find the nanostructure optimal orientation and position on membrane. Additionally, the transducer element properties are analysed at nanoscale. We focus on the piezoresistive and piezoelectric nanostructure. For piezoresistive transducer element, we introduce physical origin of the p-type silicon nanowire, single wall carbon nanotube. The innovative tunnel junctional nanostructures are also proposed. For piezoelectric nanostructure, an original AFM investigation method is presented. Our study can help us to adequately understand the electric transport behaviour of nanostructure at nanoscale under the mechanical stress impact and to design the innovation NEMS.