Lead Zirconate Titanate Piezoelectric Cantilevers for Multimode Vibrating Microelectromechanical Systems

Download or read book Lead Zirconate Titanate Piezoelectric Cantilevers for Multimode Vibrating Microelectromechanical Systems written by Zheng Xuqian and published by . This book was released on 2015 with total page 67 pages. Available in PDF, EPUB and Kindle. Book excerpt: Among the significant advances microelectromechanical systems (MEMS) have enabled in transforming portable low-power electronic devices and integrated energy-efficient systems, piezoelectric MEMS (PiezoMEMS) technologies take an important share of the contributions, especially the ones based on lead zirconate titanate (PZT). In this work, we study the PZT-based PiezoMEMS cantilevers on their mechanical and piezoelectric properties for potential applications. We first introduce the cantilever fabrication process used to achieve optimized piezoelectric properties and designed device structures. Then, we discuss the composite stacking of the cantilevers and the modeling of bending moment and stress distribution. We extract the piezoelectric coefficient of the PZT layer, which is e31 = -5 C/m^2. Next, we evaluate multimode resonances of the cantilevers using theoretical modeling, finite element simulation, and optical and electrical measurements. Finally, we characterize the energy conversion properties of such cantilevers and achieve multimode mechanical-to-electrical energy conversion in ultrasonic frequency ranges.