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Language: en
Pages: 672
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Type: BOOK - Published: 2011-06-13 - Publisher: CRC Press
Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews differe
Language: en
Pages: 1992
Pages: 1992
Type: BOOK - Published: 2018-12-14 - Publisher: CRC Press
Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised
Language: en
Pages: 1992
Pages: 1992
Type: BOOK - Published: 2011-08-01 - Publisher: CRC Press
Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised
Language: en
Pages:
Pages:
Type: BOOK - Published: 2008-01-31 - Publisher:
Language: en
Pages: 0
Pages: 0
Type: BOOK - Published: 2018-07-16 - Publisher: Springer
This volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisciplinary te