Nanofabrication Using Focused Ion and Electron Beams

Nanofabrication Using Focused Ion and Electron Beams
Author :
Publisher : OUP USA
Total Pages : 830
Release :
ISBN-10 : 9780199734214
ISBN-13 : 0199734216
Rating : 4/5 (14 Downloads)

Book Synopsis Nanofabrication Using Focused Ion and Electron Beams by : Ivo Utke

Download or read book Nanofabrication Using Focused Ion and Electron Beams written by Ivo Utke and published by OUP USA. This book was released on 2012-05 with total page 830 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book comprehensively reviews the achievements and potentials of a minimally invasive, three-dimensional, and maskless surface structuring technique operating at nanometer scale by using the interaction of focused ion and electron beams (FIB/FEB) with surfaces and injected molecules.


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