Nanopositioning Technologies

Download or read book Nanopositioning Technologies written by Changhai Ru and published by Springer. This book was released on 2015-12-22 with total page 412 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.