Plasma Etching

Author	: M. Sugawara
Publisher	: OUP Oxford
Total Pages	: 362
Release	: 1998-05-28
ISBN-10	: 9780191590290
ISBN-13	: 0191590290
Rating	: 4/5 (90 Downloads)

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Book Synopsis Plasma Etching by : M. Sugawara

Download or read book Plasma Etching written by M. Sugawara and published by OUP Oxford. This book was released on 1998-05-28 with total page 362 pages. Available in PDF, EPUB and Kindle. Book excerpt: The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.

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