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Language: en
Pages: 552
Pages: 552
Type: BOOK - Published: 2011-03-21 - Publisher: John Wiley & Sons
The building blocks of MEMS design through closed-form solutions Microelectromechanical Systems, or MEMS, is the technology of very small systems; it is found i
Language: en
Pages: 327
Pages: 327
Type: BOOK - Published: 2005-04-12 - Publisher: Elsevier
Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro
Language: en
Pages: 415
Pages: 415
Type: BOOK - Published: 2006-01-16 - Publisher: Springer Science & Business Media
This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer’s viewpoint
Language: en
Pages: 497
Pages: 497
Type: BOOK - Published: 2011-02-17 - Publisher: Cambridge University Press
A practical and systematic overview of the design, fabrication and test of MEMS-based inertial sensors, this comprehensive and rigorous guide shows you how to a
Language: en
Pages: 415
Pages: 415
Type: BOOK - Published: 2021-05-14 - Publisher: McGraw Hill Professional
A complete guide to MEMS engineering, fabrication, and applications This comprehensive engineering guide shows, step by step, how to incorporate cutting-edge mi