Silicide Technology for Integrated Circuits
| Author | : Institution of Electrical Engineers |
| Publisher | : IET |
| Total Pages | : 302 |
| Release | : 2004-12-21 |
| ISBN-10 | : 0863413528 |
| ISBN-13 | : 9780863413520 |
| Rating | : 4/5 (28 Downloads) |
Book Synopsis Silicide Technology for Integrated Circuits by : Institution of Electrical Engineers
Download or read book Silicide Technology for Integrated Circuits written by Institution of Electrical Engineers and published by IET. This book was released on 2004-12-21 with total page 302 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first book to provide guidance on the development and application of metal silicide technology as it emerges from the scientific to the prototype and manufacturing stages. Other key topics covered are fundamentals, present and future silicide technology for Si-based devices, and characterisation methods. Suitable for engineers and students in microelectronics.
